JPH0334U - - Google Patents
Info
- Publication number
- JPH0334U JPH0334U JP5795589U JP5795589U JPH0334U JP H0334 U JPH0334 U JP H0334U JP 5795589 U JP5795589 U JP 5795589U JP 5795589 U JP5795589 U JP 5795589U JP H0334 U JPH0334 U JP H0334U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- arm
- processing head
- drive device
- crushing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5795589U JPH0334U (en]) | 1989-05-18 | 1989-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5795589U JPH0334U (en]) | 1989-05-18 | 1989-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0334U true JPH0334U (en]) | 1991-01-07 |
Family
ID=31583134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5795589U Pending JPH0334U (en]) | 1989-05-18 | 1989-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334U (en]) |
-
1989
- 1989-05-18 JP JP5795589U patent/JPH0334U/ja active Pending
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